Microanalysis by Focused MeV Helium Ion Beam

Abstract

A microbeam line with 1.5 MeV helium ions for Rutherford backscattering (RBS) and particle-induced X-ray emission (PIXE) measurements has been realized by piezo-driven objective slits and a magnetic quadrupole doublet. A minimum beam spot size of 1.3 µm×2.2 µm was obtained. Secondary electron and Rutherford backscattering mapping images were demonstrated.