T.P. Donohue

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Publications

Citations

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Active since

1979

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

T.P. Donohue is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, integrated circuit design, and physical design.

Publications per year

1979–1997

Publications

1 &#181;m MOSFET VLSI technology: Part VI&#8212;Electron-beam lithography

W. D. Grobman, H.E. Luhn, T.P. Donohue et al. · IEEE Transactions on Electron Devices · 1979 · 34 citations

Engineering, Computer Engineering, Electrical Engineering +16

X-ray lithography for ⩽100 nm ground rules in complex patterns

Scott D. Hector, Victor Pol, Azalia A. Krasnoperova et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 19 citations

Engineering, Materials Engineering, Digital Fabrication +14

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