H.E. Luhn

Nanostructure technology

T. H. P. Chang, D. P. Kern, E. Kratschmer et al. · IBM Journal of Research and Development · 1988 · 50 citations

Engineering, Materials Engineering, Materials Science +13

Fabrication of a miniature 8K-bit memory chip using electron-beam exposure

H.N. Yu, R.H. Dennard, T. H. P. Chang et al. · Journal of Vacuum Science and Technology · 1975 · 48 citations

Engineering, Computer Engineering, Electrical Engineering +15

1 µm MOSFET VLSI technology: Part VI—Electron-beam lithography

W. D. Grobman, H.E. Luhn, T.P. Donohue et al. · IEEE Transactions on Electron Devices · 1979 · 34 citations

Engineering, Computer Engineering, Electrical Engineering +16

1 µm MOSFET VLSI technology: Part V—A single-level polysilicon technology using electron-beam lithography

W. R. Hunter, W. D. Grobman, C. M. Osburn et al. · IEEE Transactions on Electron Devices · 1979 · 23 citations

Engineering, Computer Engineering, Electrical Engineering +17

Lithography for ultrashort channel silicon field effect transistor circuits

S. A. Rishton, H. Schmid, D. P. Kern et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 20 citations

Engineering, Electrical Engineering, Electronic Materials +13