P. Agnello

Dual stress liner for high performance sub-45nm gate length SOI CMOS manufacturing

Haining Yang, R. Malik, Y. Li et al. · 2005 · 142 citations

Engineering, Electrical Engineering, Manufacturing Engineering +11

High performance 14nm SOI FinFET CMOS technology with 0.0174µm ² embedded DRAM and 15 levels of Cu metallization

C-H. Lin, B. Greene, J. Cai et al. · 2014 · 129 citations

Engineering, Computer Engineering, Electrical Engineering +9

High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography

P. Agnello, T. Ivers, C. Warm et al. · 2006 · 115 citations

Engineering, Computer Engineering, Electrical Engineering +17

Silicides and local interconnections for high-performance VLSI applications

R. Mann, L. A. Clevenger, P. Agnello et al. · IBM Journal of Research and Development · 1995 · 102 citations

Engineering, Computer Engineering, Electrical Engineering +17

22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried et al. · 2012 · 89 citations

Engineering, Computer Engineering, Electrical Engineering +17