Luc Geenen

New low-stress PECVD poly-SiGe layers for MEMS

Cristina Rusu, Sherif Sedky, Brigitte Parmentier et al. · Journal of Microelectromechanical Systems · 2003 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +17

N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

P. Meunier-Beillard, Matty Caymax, Kris Van Nieuwenhuysen et al. · Applied Surface Science · 2003 · 36 citations

Engineering, Materials Engineering, Materials Science +14

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Bartek Pawlak, Richard Lindsay, R. Surdeanu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

Cesium near-surface concentration in low energy, negative mode dynamic SIMS

Bart Berghmans, Benny Van Daele, Luc Geenen et al. · Applied Surface Science · 2008 · 16 citations

Natural Sciences, Chemistry, Physics +6

Accurate electrical activation characterization of CMOS ultra-shallow profiles

Trudo Clarysse, Fabian Dortu, Danielle Vanhaeren et al. · Materials Science and Engineering B · 2004 · 15 citations

Engineering, Computer Engineering, Electrical Engineering +10