Bart Berghmans

Experimental studies of dose retention and activation in fin field-effect-transistor-based structures

Jay Mody, Ray Duffy, Pierre Eyben et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 31 citations

Engineering, Electrical Engineering, Materials Science +17

The fate of the (reactive) primary ion: Sputtering and desorption

Wilfried Vandervorst, Tom Janssens, Cedric Huyghebaert et al. · Applied Surface Science · 2008 · 20 citations

Natural Sciences, Chemistry, Physics +8

Cesium near-surface concentration in low energy, negative mode dynamic SIMS

Bart Berghmans, Benny Van Daele, Luc Geenen et al. · Applied Surface Science · 2008 · 16 citations

Natural Sciences, Chemistry, Physics +6

The effect of oxygen during irradiation of silicon with low energy Cs+ ions

Bart Berghmans, Wilfried Vandervorst · Journal of Applied Physics · 2009 · 12 citations · Full text

Natural Sciences, Chemistry, Materials Science +17