Concepedia
Statistics
Publications
52
Citations
1.5K
H-Index
22
Active since
2001
Affiliations
IMEC(Current)
KU Leuven
Imec the Netherlands
Applied Materials (United States)
Infineon Technologies (Germany)
Pierre Eyben is an author at IMEC specializing in materials science, engineering, and semiconductor devices.
Publications per year
2001–2021
Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling
Pierre Eyben, Man Xu, Natasja Duhayon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 122 citations
Engineering, Electrical Engineering, Materials Science +17
Evolution of metastable phases in silicon during nanoindentation: mechanism analysis and experimental verification
Kausala Mylvaganam, L C Zhang, Pierre Eyben et al. · Nanotechnology · 2009 · 121 citations
Natural Sciences, Materials Engineering, Materials Science +17
Assessing the performance of two-dimensional dopant profiling techniques
Natasja Duhayon, Pierre Eyben, Marc Fouchier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 67 citations
Conductive diamond tips with sub‐nanometer electrical resolution for characterization of nanoelectronics device structures
Thomas Hantschel, Cindy Demeulemeester, Pierre Eyben et al. · physica status solidi (a) · 2009 · 64 citations
Natural Sciences, Electrical Engineering, Materials Science +14
Sub-5-nm-spatial resolution in scanning spreading resistance microscopy using full-diamond tips
David Álvarez, J. Hartwich, Marc Fouchier et al. · Applied Physics Letters · 2003 · 64 citations
Engineering, Electrical Engineering, Materials Science +15
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