Natasja Duhayon

Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling

Pierre Eyben, Man Xu, Natasja Duhayon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 120 citations

Engineering, Microscopy, Integrated Circuits +21

Assessing the performance of two-dimensional dopant profiling techniques

Natasja Duhayon, Pierre Eyben, Marc Fouchier et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 67 citations

Engineering, Electron-beam Lithography, Microscopy +17

Detailed study of scanning capacitance microscopy on cross-sectional and beveled junctions

Natasja Duhayon, Trudo Clarysse, Pierre Eyben et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 28 citations

Engineering, Microscopy, Beveled Junctions +17

Manufacturing of high aspect-ratio p-n junctions using vapor phase doping for application in multi-Resurf devices

Carolina Corrêa Rochefort, R. van Dalen, Natasja Duhayon et al. · 2003 · 21 citations

Engineering, Power Electronics, Semiconductor Device +17

Carrier spilling revisited: On-bevel junction behavior of different electrical depth profiling techniques

Trudo Clarysse, Pierre Eyben, Natasja Duhayon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 18 citations

Engineering, Spreading Resistance Probe, On-bevel Junction Behavior +18