Trudo Clarysse

Status and review of two-dimensional carrier and dopant profiling using scanning probe microscopy

Peter Wolf, R. J. Stephenson, Thomas Trenkler et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 190 citations

Engineering, Microscopy, Semiconductor Device +22

Diffusion, activation, and recrystallization of boron implanted in preamorphized and crystalline germanium

A. Satta, Eddy Simoen, Trudo Clarysse et al. · Applied Physics Letters · 2005 · 137 citations

Materials Science, Crystalline Germanium, Boron Nitride +8

Scanning spreading resistance microscopy and spectroscopy for routine and quantitative two-dimensional carrier profiling

Pierre Eyben, Man Xu, Natasja Duhayon et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 120 citations

Engineering, Microscopy, Integrated Circuits +21

Characterization of a point-contact on silicon using force microscopy-supported resistance measurements

Peter Wolf, J. Snauwaert, Trudo Clarysse et al. · Applied Physics Letters · 1995 · 112 citations

Engineering, Microscopy, Mechanical Engineering +19

Ion-implantation issues in the formation of shallow junctions in germanium

Eddy Simoen, A. Satta, A. D’Amore et al. · Materials Science in Semiconductor Processing · 2006 · 112 citations

Ion Implantation, Physics, Applied Physics +3