N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C - Concepedia

Concepedia

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N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

36

Citations

11

References

2003

Year

P. Meunier-Beillard, Matty Caymax, Kris Van Nieuwenhuysen, Geert Doumen, Bert Brijs, M Hopstaken, Luc Geenen, Wilfried Vandervorst

Applied Surface Science

Carrier GasEngineeringEnhanced EpitaxyApplied PhysicsSiliceneHydrogenChemistryMolecular Beam EpitaxySilicon On Insulator

References

	Year	Citations

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