Matty Caymax

Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide

Annelies Delabie, Florence Bellenger, Michel Houssa et al. · Applied Physics Letters · 2007 · 270 citations

Engineering, Materials Engineering, Materials Science +17

Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance

D.P. Brunco, Brice De Jaeger, Geert Eneman et al. · Journal of The Electrochemical Society · 2008 · 265 citations

Engineering, Materials Engineering, Materials Science +17

Undoped and <i>in-situ</i> B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition

Benjamin Vincent, Federica Gencarelli, H. Bender et al. · Applied Physics Letters · 2011 · 188 citations · Full text

Natural Sciences, Materials Science, Physics +16

Island growth in the atomic layer deposition of zirconium oxide and aluminum oxide on hydrogen-terminated silicon: Growth mode modeling and transmission electron microscopy

Riikka L. Puurunen, Wilfried Vandervorst, W.F.A. Besling et al. · Journal of Applied Physics · 2004 · 156 citations

Natural Sciences, Materials Engineering, Materials Science +17

Germanium surface passivation and atomic layer deposition of high-<i>k</i>dielectrics—a tutorial review on Ge-based MOS capacitors

Qi Xie, Shaoren Deng, Marc Schaekers et al. · Semiconductor Science and Technology · 2012 · 155 citations

Engineering, Materials Engineering, Materials Science +17