Accurate electrical activation characterization of CMOS ultra-shallow profiles

A Spreading Resistance Technique for Resistivity Measurements on Silicon

R. G. Mazur, D. H. Dickey · Journal of The Electrochemical Society · 1966 · 249 citations

Engineering, Electrical Engineering, Materials Science +17

Spreading resistance:A quantitative tool for process control and development

M. Pawlik · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 39 citations

Engineering, Chemical Engineering, Process Design +14

Impact of probe penetration on the electrical characterization of sub-50 nm profiles

Trudo Clarysse, Danielle Vanhaeren, Wilfried Vandervorst · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 27 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Bartek Pawlak, Richard Lindsay, R. Surdeanu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 22 citations

Engineering, Electrical Engineering, Materials Science +17

Sheet resistance corrections for spreading resistance ultrashallow profiling

Trudo Clarysse, Wilfried Vandervorst, M. Pawlik · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 18 citations

Natural Sciences, Electrical Engineering, Materials Science +17