M. Pawlik

Spreading resistance:A quantitative tool for process control and development

M. Pawlik · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 39 citations

Engineering, Chemical Engineering, Process Design +14

Sheet resistance corrections for spreading resistance ultrashallow profiling

Trudo Clarysse, Wilfried Vandervorst, M. Pawlik · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 18 citations

Natural Sciences, Electrical Engineering, Materials Science +17

Techniques and applications of secondary ion mass spectrometry and spreading resistance profiling to measure ultrashallow junction implants down to 0.5 keV B and BF2

William L. Harrington, C. W. Magee, M. Pawlik et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 18 citations

Engineering, Electrical Engineering, Materials Science +16

Secondary ion mass spectrometry depth profiling of nanometer-scale <i>p</i>+-<i>n</i> junctions fabricated by Ga+ focused ion beam implantation

Steven W. Novak, C. W. Magee, H. C. Mogul et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 15 citations

Engineering, Materials Engineering, Materials Science +14

Towards a physical understanding of spreading resistance probe technique profiling

J. Snauwaert, L. Hellemans, I. Czech et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 14 citations

Engineering, Electrical Engineering, Materials Science +17