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Effect of molecular weight on the EUV-printability of main chain scission type polymers

Ashish Rathore, Ivan Pollentier, Harpreet Singh, Roberto Fallica, Danilo De Simone, Stefan De Gendt

Journal of Materials Chemistry C · 2020 · 39 citations · 16 references

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Abstract

This study on the main chain scission type polymers, PMMA and a copolymer system, shows that the EUV-printability is proportional to the<italic>M</italic><sub>w</sub>of the starting material, which is attributed to the enhanced litho-parameters of higher<italic>M</italic><sub>w</sub>material.

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