Publication | Open Access
Effect of molecular weight on the EUV-printability of main chain scission type polymers
36
Citations
16
References
2020
Year
EngineeringMechanical EngineeringResponsive PolymersChemistryPolymersEnhanced Litho-parametersPolymer MaterialPolymer TechnologyMacromolecular EngineeringPolymer ProcessingPolymer ChemistryMaterials SciencePolymer EngineeringPolymer Analysis3D PrintingCopolymer SystemNatural SciencesPolymer SciencePolymer CharacterizationPolymer PropertyMolecular Weight
This study on the main chain scission type polymers, PMMA and a copolymer system, shows that the EUV-printability is proportional to the<italic>M</italic><sub>w</sub>of the starting material, which is attributed to the enhanced litho-parameters of higher<italic>M</italic><sub>w</sub>material.
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