Roberto Fallica

Absorption coefficient of metal-containing photoresists in the extreme ultraviolet

Roberto Fallica, Jarich Haitjema, Lianjia Wu et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 80 citations · Full text

Ultraviolet Light, Optical Materials, Engineering +20

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

Roberto Fallica, Jason K. Stowers, Andrew Grenville et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 78 citations · Full text

Short Wavelength Optic, Optical Materials, Engineering +19

Organometallic carboxylate resists for extreme ultraviolet with high sensitivity

James Passarelli, Michael Murphy, Ryan Del Re et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 52 citations · Full text

Macromolecular Chemistry, Engineering, Responsive Polymers +18

Thermal and Electrical Characterization of Materials for Phase-Change Memory Cells

Roberto Fallica, Jean‐Luc Battaglia, S. Cocco et al. · Journal of Chemical & Engineering Data · 2009 · 49 citations

Effect of nitrogen doping on the thermal conductivity of GeTe thin films

Roberto Fallica, E. Varesi, Luca Fumagalli et al. · physica status solidi (RRL) - Rapid Research Letters · 2013 · 43 citations

Engineering, Thin Film Process Technology, Thermal Conductivity +18