Concepedia

Jason K. Stowers

JK

Statistics

Publications

16

Citations

645

H-Index

13

Active since

2005

Affiliations

Inpria (United States)(Current)

IMEC

Oregon State University

University of Oregon

Paul Scherrer Institute

Jason K. Stowers is an author at Inpria (United States) specializing in materials science, materials engineering, and natural sciences.

Publications per year

2005–2020

16

Publications

16

High resolution, high sensitivity inorganic resists

Jason K. Stowers, Douglas A. Keszler · Microelectronic Engineering · 2008 · 98 citations

, , +8

Integrated fab process for metal oxide EUV photoresist

Andrew Grenville, Jeremy T. Anderson, Benjamin L. Clark et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 83 citations

, , +15

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

Roberto Fallica, Jason K. Stowers, Andrew Grenville et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 80 citations · Full text

, , +13

Directly patterned inorganic hardmask for EUV lithography

Jason K. Stowers, Alan Telecky, Michael Kocsis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 66 citations

, , +14

Low-temperature, solution processing of TiO2 thin films and fabrication of multilayer dielectric optical elements

Kai Jiang, Andriy Zakutayev, Jason K. Stowers et al. · Solid State Sciences · 2009 · 56 citations

, , +16

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