Concepedia

Inpria (United States)

I(

Statistics

Publications

55

Citations

4.1K

Authors

16

Location

Corvallis, United States

Inpria (United States) is a company institution in Corvallis, United States known for materials science, materials engineering, and natural sciences.

HomepageROR

Top concepts

Publications

55

Integrated fab process for metal oxide EUV photoresist

Andrew Grenville, Jeremy T. Anderson, Benjamin L. Clark et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 83 citations

, , +15

Dynamic absorption coefficients of chemically amplified resists and nonchemically amplified resists at extreme ultraviolet

Roberto Fallica, Jason K. Stowers, Andrew Grenville et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2016 · 80 citations · Full text

, , +13

Competitive device performance of low-temperature and all-solution-processed metal-oxide thin-film transistors

Kyung Min Kim, Chi Wan Kim, Jaeseok Heo et al. · Applied Physics Letters · 2011 · 74 citations

, , +17

Directly patterned inorganic hardmask for EUV lithography

Jason K. Stowers, Alan Telecky, Michael Kocsis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 66 citations

, , +14

A numeric model for the imaging mechanism of metal oxide EUV resists

William D. Hinsberg, Stephen T. Meyers · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 65 citations

, , +13

1–5 of 55

Authors

16

  1. AG
    Andrew Grenville

    Inpria (United States), United States

    74 publications · 1.3K citations

    16

    h-index

  2. JK
    Jason K. Stowers

    Inpria (United States), United States

    29 publications · 670 citations

    13

    h-index

  3. ST
    Stephen T. Meyers

    Inpria (United States), United States

    28 publications · 966 citations

    13

    h-index

  4. YK
    Yong Kee Hwang

    Inpria (United States), United States

    15 publications · 142 citations

    6

    h-index

  5. AT
    Alan Telecky

    Inpria (United States), United States

    8 publications · 244 citations

    5

    h-index

1–5 of 16