Concepedia
Statistics
Publications
2
Citations
116
H-Index
Active since
2006
Affiliations
Yokkaichi University(Current)
The University of Osaka
Takumi Shigaki is an author at Yokkaichi University specializing in chemistry, engineering, and chemical engineering.
Top concepts
ChemistryEngineeringMaterial ScienceChemical EngineeringPhotocatalysisPhotochemistryApplied PhysicsPolymer SciencePattern FormationPolymer Chemistry
Publications per year
2006–2006
Analysis of acid yield generated in chemically amplified electron beam resist
Takahiro Kozawa, Takumi Shigaki, Kazumasa Okamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 99 citations
Engineering, Electron-beam Lithography, Acid Generation +17
Relationship between Acid Generator Concentration and Acid Yield in Chemically Amplified Electron Beam Resist
Takumi Shigaki, Kazumasa Okamoto, Takahiro Kozawa et al. · Japanese Journal of Applied Physics · 2006 · 17 citations
Materials Science, Electrical Engineering, Chemical Engineering +7
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