Concepedia

Kazumasa Okamoto

KO

53

Publications

2K

Citations

25

H-Index

1999

Active since

Affiliations

The University of Osaka(Current)

Hokkaido University

Tokyo Ohka Kogyo (Japan)

Osaka Research Institute of Industrial Science and Technology

Japan Science and Technology Agency

Kazumasa Okamoto is an author at The University of Osaka specializing in engineering, chemistry, and chemical engineering.

Top concepts

EngineeringChemistryMaterial SciencePolymer SciencePolymer ChemistryChemical EngineeringApplied PhysicsPhotochemistryPhysical ChemistryOrganic Chemistry

Publications per year

1999–2021

53

Publications

53

Proton Dynamics in Chemically Amplified Electron Beam Resists

Hiroki Yamamoto, Takahiro Kozawa, Atsuro Nakano et al. · Japanese Journal of Applied Physics · 2004 · 179 citations

Coumarin 6, Engineering, Responsive Polymers +18

Potential Cause of Inhomogeneous Acid Distribution in Chemically Amplified Resists for Post Optical Lithography

Hiroki Yamamoto, Takahiro Kozawa, Atsuro Nakano et al. · Japanese Journal of Applied Physics · 2005 · 132 citations

Engineering, Electron-beam Lithography, Acid Generation Efficiency +18

Protonation Sites in Chemically Amplified Resists for Electron-Beam Lithography

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2006 · 122 citations

Chemical Engineering, Engineering, Electron-beam Lithography +12

Study of Acid-Base Equilibrium in Chemically Amplified Resist

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2007 · 113 citations

Engineering, Acid-base Chemistry, Pattern Formation Reactions +16

Requirements for Laser-Induced Desorption/Ionization on Submicrometer Structures

Shoji Okuno, Ryuichi Arakawa, Kazumasa Okamoto et al. · Analytical Chemistry · 2005 · 102 citations

Materials Science, Ion Implantation, Various Submicrometer Structures +14

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