Concepedia

Kenichiro Natsuda

KN

5

Publications

319

Citations

5

H-Index

2006

Active since

Affiliations

The University of Osaka(Current)

Kenichiro Natsuda is an author at The University of Osaka specializing in engineering, physical chemistry, and chemistry.

Top concepts

ChemistryEngineeringPhysical ChemistryChemical EngineeringApplied PhysicsPolymer ScienceChemical KineticsCatalysisBiophysicsPhotochemistry

Publications per year

2006–2009

5

Publications

5

Protonation Sites in Chemically Amplified Resists for Electron-Beam Lithography

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2006 · 122 citations

Chemical Engineering, Engineering, Electron-beam Lithography +12

Study of Acid-Base Equilibrium in Chemically Amplified Resist

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2007 · 113 citations

Engineering, Acid-base Chemistry, Pattern Formation Reactions +16

Correlation between C<sub>37</sub> Parameters and Acid Yields in Chemically Amplified Resists upon Exposure to 75 keV Electron Beam

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto et al. · Japanese Journal of Applied Physics · 2009 · 32 citations

Formation of Intramolecular Poly(4-hydroxystyrene) Dimer Radical Cation

Kazumasa Okamoto, Takahiro Kozawa, Kenichiro Natsuda et al. · The Journal of Physical Chemistry B · 2008 · 31 citations

Study of the Reaction of Acid Generators with Epithermal and Thermalized Electrons

Kenichiro Natsuda, Takahiro Kozawa, Akinori Saeki et al. · Japanese Journal of Applied Physics · 2008 · 21 citations

Engineering, Energy Conversion, Secondary Electrons +17

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