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Comparison of MIBK/IPA and water/IPA as PMMA developers for electron beam nanolithography

Materials ScienceElectron Beam NanolithographyEngineeringElectron-beam LithographyBeam LithographyMicrofabricationNanotechnologyNanomaterialsMaterials FabricationApplied PhysicsPmma DevelopersMicroanalysisNanometrologyNanofabricationNanolithography Method