Concepedia

Publication | Closed Access

Challenges of nickel silicidation in CMOS technologies

DOI

51

Citations

19

References

2014

Year

N. Breil, C. Lavoie, Ahmet S. Özcan, F.H. Baumann, N. Klymko, Karen Nummy, Bing Sun, Jean Jordan‐Sweet, Jian Yu, Frank Zhu,
Microelectronic Engineering

References

YearCitations

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