F. M. d’Heurle

Statistics

Publications

152

Citations

8.7K

H-Index

Active since

1961

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

KTH Royal Institute of Technology

University of North Carolina at Chapel Hill

F. M. d’Heurle is an author at IBM Research - Thomas J. Watson Research Center specializing in materials science, natural sciences, and materials engineering.

Publications per year

1961–2006

152

Publications

152

Towards implementation of a nickel silicide process for CMOS technologies

C. Lavoie, F. M. d’Heurle, Christophe Detavernier et al. · Microelectronic Engineering · 2003 · 406 citations

Engineering, Electrical Engineering, Materials Engineering +12

Nucleation of a new phase from the interaction of two adjacent phases: Some silicides

F. M. d’Heurle · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 398 citations

Natural Sciences, Materials Science, Physics +13

Reduction of Electromigration in Aluminum Films by Copper Doping

I. Ames, F. M. d’Heurle, R. E. Horstmann · IBM Journal of Research and Development · 1970 · 301 citations

Natural Sciences, Materials Engineering, Materials Science +17

Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

F. M. d’Heurle, J. M. E. Harper · Thin Solid Films · 1989 · 293 citations

Natural Sciences, Materials Engineering, Materials Science +12

Aluminum films deposited by rf sputtering

F. M. d’Heurle · Metallurgical Transactions · 1970 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +13

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