Concepedia

F. M. d’Heurle

FM

152

Publications

8.7K

Citations

53

H-Index

1961

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

KTH Royal Institute of Technology

University of North Carolina at Chapel Hill

F. M. d’Heurle is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceSurface ScienceMaterials EngineeringThin FilmsChemistryPhysicsCrystalline DefectsMicrostructure

Publications per year

1961–2006

152

Publications

152

Towards implementation of a nickel silicide process for CMOS technologies

C. Lavoie, F. M. d’Heurle, Christophe Detavernier et al. · Microelectronic Engineering · 2003 · 404 citations

Electrical Engineering, Engineering, Vlsi Design +9

Nucleation of a new phase from the interaction of two adjacent phases: Some silicides

F. M. d’Heurle · Journal of materials research/Pratt's guide to venture capital sources · 1988 · 395 citations

Crystal Structure, Adjacent Phases, Nuclear Physics +6

Reduction of Electromigration in Aluminum Films by Copper Doping

I. Ames, F. M. d’Heurle, R. E. Horstmann · IBM Journal of Research and Development · 1970 · 301 citations

Aluminium Nitride, Engineering, Aluminum Films +18

Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

F. M. d’Heurle, J. M. E. Harper · Thin Solid Films · 1989 · 290 citations

Materials Science, Materials Engineering, Engineering +9

Aluminum films deposited by rf sputtering

F. M. d’Heurle · Metallurgical Transactions · 1970 · 269 citations

Materials Engineering, Materials Science, Engineering +5

Rows per page

1–5 of 152