Towards implementation of a nickel silicide process for CMOS technologies - Concepedia

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Towards implementation of a nickel silicide process for CMOS technologies

404

Citations

72

References

2003

Year

C. Lavoie, F. M. d’Heurle, Christophe Detavernier, C. Cabral

Microelectronic Engineering

Electrical EngineeringEngineeringVlsi DesignNanoelectronicsApplied PhysicsNickel Silicide ProcessComputer EngineeringCmos TechnologySemiconductor Device FabricationSilicon On InsulatorMicroelectronicsInterconnect (Integrated Circuits)

References

	Year	Citations

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