Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering - Concepedia

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Note on the origin of intrinsic stresses in films deposited via evaporation and sputtering

290

Citations

71

References

1989

Year

F. M. d’Heurle, J. M. E. Harper

Thin Solid Films

Materials ScienceMaterials EngineeringEngineeringPhysicsSurface ScienceApplied PhysicsResidual StressIntrinsic StressesThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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