Fabrication and mobility characteristics of ultra-thin strained Si directly on insulator (SSDOI) MOSFETs

K. Rim, K. Chan, L. Shi, +17

Materials EngineeringUltra-thin Strained SiElectrical EngineeringTensile-strained Si LayerEngineering +10

A 300-mm wafer-level three-dimensional integration scheme using tungsten through-silicon via and hybrid Cu-adhesive bonding

F. Liu, R. Yu, Anthony Young, +20

EngineeringCu BeolInterconnect (Integrated Circuits)Wafer Scale ProcessingAdvanced Packaging (Semiconductors) +16

High performance extremely thin SOI (ETSOI) hybrid CMOS with Si channel NFET and strained SiGe channel PFET

K. Cheng, A. Khakifirooz, N. Loubet, +40

Challenges of nickel silicidation in CMOS technologies

N. Breil, C. Lavoie, Ahmet S. Özcan, +9

Microelectronic Engineering

Materials EngineeringChemical EngineeringEngineeringNanoelectronicsCmos Technologies +3

Oxygen induced adhesion degradation at metal/polyimide interface

Da‐Yuan Shih, N. Klymko, R. Flitsch, +2

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials SciencePeel StrengthPeel StrengthsEngineeringAdhesive Material +11

A study of the chemical and physical interaction between copper and polyimide

D‐Y. Shih, J. Paraszczak, N. Klymko, +9

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringPhysical InteractionChemistryPolymersConducting Polymer +15

Effect of rapid thermal annealing on strain in ultrathin strained silicon on insulator layers

T. S. Drake, Cáit Ní Chléirigh, Minjoo Larry Lee, +8

Applied Physics Letters

EngineeringSilicon On InsulatorSemiconductor DeviceSemiconductorsUltrathin Strained Silicon +14

Methods of producing plasma enhanced chemical vapor deposition silicon nitride thin films with high compressive and tensile stress

Michael Belyansky, M. A. Chace, Oleg Gluschenkov, +9

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceSurface TechnologyEngineeringCrystalline DefectsMaterials Characterization +13

Fabrication of ultra-thin strained silicon on insulator

T. S. Drake, Cáit Ní Chléirigh, Minjoo Larry Lee, +8

Journal of Electronic Materials

Ultra-thin Strained SiliconEngineeringMicrofabricationApplied PhysicsSemiconductor Device Fabrication +2

Aggressively Scaled Strained-Silicon-on-Insulator Undoped-Body High- $\kappa$/Metal-Gate nFinFETs for High-Performance Logic Applications

K. Maitra, A. Khakifirooz, Pranita Kulkarni, +15

IEEE Electron Device Letters

SemiconductorsHigh-performance Logic ApplicationsElectrical EngineeringElectronic DevicesEngineering +13