Karen Nummy

300-mm Monolithic Silicon Photonics Foundry Technology

Ken Giewont, Shuren Hu, Bo Peng et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2019 · 254 citations

Engineering, Device Integration, Integrated Photonics +16

High Performance 45-nm SOI Technology with Enhanced Strain, Porous Low-k BEOL, and Immersion Lithography

P. Agnello, T. Ivers, C. Warm et al. · 2006 · 115 citations

Engineering, Vlsi Design, Enhanced Strain +21

45nm CMOS - Silicon Photonics Monolithic Technology (45CLO) for next-generation, low power and high speed optical interconnects

Michał Rakowski, Colleen Meagher, Karen Nummy et al. · 2020 · 95 citations

Optical Materials, Engineering, Device Integration +20

22nm High-performance SOI technology featuring dual-embedded stressors, Epi-Plate High-K deep-trench embedded DRAM and self-aligned Via 15LM BEOL

P. Chang, C. Ortolland, David Fried et al. · 2012 · 89 citations

High-performance Soi Technology, Engineering, Vlsi Design +16

Challenges of nickel silicidation in CMOS technologies

N. Breil, C. Lavoie, Ahmet S. Özcan et al. · Microelectronic Engineering · 2014 · 51 citations

Materials Engineering, Chemical Engineering, Engineering +5