Concepedia

Fabrication of microsensor and microactuator elements by the LIGA-process

J. J. Mohr, P. Bley, C. Burbaum, Wolfgang Menz, Ulrike Wallrabe

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 16 citations · 9 references

Abstract

By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated. Their characteristics and results concerning their behavior are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>

References

9

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 957 citations

Materials Science, Engineering, Plastic Moulding +10

Laterally Driven Polysilicon Resonant Microstructures

William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe · Sensors and Actuators · 1989 · 735 citations

Materials Science, Engineering, Applied Physics +2

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +8

Electrostatic Comb Drive Levitation And Control Method

William C. Tang, Martin Lim, Roger T. Howe · Journal of Microelectromechanical Systems · 1992 · 286 citations

Engineering, Mechanical Engineering, Electro Static Comb +17

Fabrication of capacitive acceleration sensors by the LIGA technique

C. Burbaum, J. Mohr, P. Bley et al. · Sensors and Actuators A Physical · 1991 · 81 citations

Engineering, Implantable Sensor, Sensors +6