Fabrication of microsensor and microactuator elements by the LIGA-process

Abstract

By combining the original LIGA-process with a sacrificial layer technique, movable microstructures are fabricated to realize microsensor and microactuator elements. As examples of movable microstructures a capacitive acceleration sensor, a microturbine, and a linear comb-drive have been fabricated. Their characteristics and results concerning their behavior are presented.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>

References

Page 1

	Year	Citations
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) E. W. Becker, W. Ehrfeld, Patric Hagmann, Microelectronic Engineering Materials ScienceEngineeringPlastic MouldingMicrofabricationDigital Fabrication	1986	957
Laterally Driven Polysilicon Resonant Microstructures William C. Tang, Tu-Cuong H. Nguyen, Roger T. Howe Sensors and Actuators Materials ScienceEngineeringApplied PhysicsMicro-optical ComponentMicrostructure	1989	735
A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs Md. Shafiqul Islam, P.J. McNally Microelectronic Engineering Wide-bandgap SemiconductorElectrical EngineeringEngineeringPhysicsNanoelectronics	1998	606
Electrostatic Comb Drive Levitation And Control Method William C. Tang, Martin Lim, Roger T. Howe Journal of Microelectromechanical Systems EngineeringMechanical EngineeringElectro Static CombMicroactuatorSuspension Structure	1992	286
Fabrication of capacitive acceleration sensors by the LIGA technique C. Burbaum, J. Mohr, P. Bley, Sensors and Actuators A Physical EngineeringImplantable SensorSensorsMicrofabricationMechanical Engineering	1991	81
The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding Wolfgang Menz, W. Bacher, Marc Harmening, EngineeringMechanical EngineeringMolding (Process)Structural MaterialsPlastic Molding	2002	80
Fabrication of a planar grating spectrograph by deep-etch lithography with synchrotron radiation J. J. Mohr, B. Anderer, W. Ehrfeld Sensors and Actuators A Physical Transient GratingPhotonicsEngineeringElectron-beam LithographyBeam Lithography	1991	43
<title>Characterization of micro-optical components fabricated by deep-etch x-ray lithography</title> Jost Goettert, J. Mohr Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyMicroscopyMechanical Engineering	1991	32
Resist technology for deep‐etch synchrotron radiation lithography J. Mohr, W. Ehrfeld, D. Münchmeyer, Makromolekulare Chemie Macromolecular Symposia EngineeringElectron-beam LithographySolubility ParametersChemistryStructural Materials	1989	27

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