Concepedia

Capacitive Acceleration Sensing

Capacitive Acceleration Sensing is a capacitive sensing modality that detects mechanical acceleration by measuring changes in capacitance resulting from the displacement of a micro-machined inertial mass within a capacitive transducer structure.

126

Publications

5.2K

Citations

408

Authors

135

Institutions

Publications per year

2017–2026

18

Parents

Publications

126

A low-noise low-offset capacitive sensing amplifier for a 50-/spl mu/g//spl radic/Hz monolithic CMOS MEMS accelerometer

Jiangfeng Wu, Gary K. Fedder, L.R. Carley · IEEE Journal of Solid-State Circuits · 2004 · 318 citations

, , +16

An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications

KW Chau, S. Lewis, Yu Zhao et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 189 citations

, , +17

Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry

Weijie Yun, Roger T. Howe, P.R. Gray · 2003 · 172 citations

, , +17

A monolithic surface micromachined accelerometer with digital output

Chin-Chin Lu, M. Lemkin, Bernhard E. Boser · IEEE Journal of Solid-State Circuits · 1995 · 156 citations

, , +17

A post-CMOS micromachined lateral accelerometer

Hao Luo, Gang Zhang, L.R. Carley et al. · Journal of Microelectromechanical Systems · 2002 · 154 citations

, , +17

1–5 of 126

Authors

408

  1. KN
    K. Najafi

    University of Michigan, United States

    9 publications · 395 citations

    9

    h-index

  2. HK
    Haluk Külah

    Middle East Technical University, Türkiye

    8 publications · 319 citations

    8

    h-index

  3. JC
    Junseok Chae

    Arizona State University, United States

    6 publications · 212 citations

    6

    h-index

  4. GK
    Gary K. Fedder

    Carnegie Mellon University, United States

    6 publications · 656 citations

    6

    h-index

  5. FA
    Farrokh Ayazi

    Georgia Institute of Technology, United States

    5 publications · 285 citations

    5

    h-index

1–5 of 408

Institutions

135

  1. University of Michigan

    Ann Arbor, United States

    10 h-index

    27 publications

    1.2K citations

  2. University of California, Berkeley

    Berkeley, United States

    8 h-index

    17 publications

    1.9K citations

  3. Carnegie Mellon University

    Pittsburgh, United States

    6 h-index

    15 publications

    1.9K citations

  4. Middle East Technical University

    Ankara, Türkiye

    5 h-index

    8 publications

    246 citations

  5. National Tsing Hua University

    Hsinchu, Taiwan

    5 h-index

    20 publications

    899 citations

  6. Huazhong University of Science and Technology

    Wuhan, China

    4 h-index

    25 publications

    701 citations

  7. Georgia Institute of Technology

    Atlanta, United States

    4 h-index

    10 publications

    425 citations

  8. KU Leuven

    Leuven, Belgium

    4 h-index

    9 publications

    303 citations

1–8 of 135

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 12 publications · 472 citations

    11

    h-index

  2. IEEE Sensors Journal

    11 publications · 472 citations

    11

    h-index

  3. Journal of Microelectromechanical Systems

    8 publications · 607 citations

    8

    h-index

  4. Sensors and Actuators A Physical

    8 publications · 549 citations

    8

    h-index

  5. Microsystem Technologies

    4 publications · 172 citations

    4

    h-index

1–5