11
Publications
905
Citations
11
H-Index
1995
Active since
M. Lemkin is an author at University of California, Berkeley specializing in engineering, mechatronics, and instrumentation.
Top concepts
EngineeringMechatronicsInstrumentationMicrofabricationEducationMicroelectronicsWearable DevicesComputer EngineeringMeasurementMechanical Systems
Publications per year
1995–2005
11
11
A 3-axis force balanced accelerometer using a single proof-mass
M. Lemkin, Bernhard E. Boser, David M. Auslander et al. · 2002 · 83 citations
A 3-axis surface micromachined ΣΔ accelerometer
M. Lemkin, M. Ortiz, N. Wongkomet et al. · 2002 · 49 citations
Integrated micro-electro-mechanical sensor development for inertial applications
James J. Allen, R.D. Kinney, J. Sarsfield et al. · 2002 · 35 citations
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