Concepedia

Integrated micro-electro-mechanical sensor development for inertial applications

James J. Allen, R.D. Kinney, J. Sarsfield, Marla Daily, JAMES ELLIS, James H. Smith, Stephen Montague, Roger T. Howe, B.E. Boser, Roberto Horowitz,

2002 · 35 citations · 8 references

Open access

Abstract

Electronic sensing circuitry and micro-electromechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper describes the Sandia M/sup 3/EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.

References

8

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Engineering, Electrical Engineering, Mechatronics Engineering +14

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T.A. Roessig, Roger T. Howe, Albert P. Pisano et al. · 2002 · 177 citations · Full text

Engineering, Mechanical Engineering, Mechatronics Engineering +17

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Engineering, Electrical Engineering, Mechatronics Engineering +17

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T. Juneau, Albert P. Pisano, James H. Smith · 2002 · 105 citations · Full text

Engineering, Mechanical Engineering, Instrumentation +9

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James H. Smith, Stephen Montague, J.J. Sniegowski et al. · 2002 · 94 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17