Stephen Montague

A vacuum packaged surface micromachined resonant accelerometer

Ashwin A. Seshia, Moorthi Palaniapan, T.A. Roessig et al. · Journal of Microelectromechanical Systems · 2002 · 332 citations

Engineering, Micromachines, Measurement +11

Embedded micromechanical devices for the monolithic integration of MEMS with CMOS

James H. Smith, Stephen Montague, J.J. Sniegowski et al. · 2002 · 94 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +18

An integrated microelectromechanical resonant output gyroscope

Ashwin A. Seshia, Roger T. Howe, Stephen Montague · 2003 · 91 citations

Coriolis Force, Engineering, Micromachines +12

Application of Chemical-Mechanical Polishing to Planarization of Surface-Micromachined Devices

R.D. Nasby, J.J. Sniegowski, James H. Smith et al. · 1996 · 57 citations · Full text

Integrated micro-electro-mechanical sensor development for inertial applications

James J. Allen, R.D. Kinney, J. Sarsfield et al. · 2002 · 35 citations

Engineering, Measurement, Mechanical Engineering +18