Fabrication of capacitive acceleration sensors by the LIGA technique

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Miniaturization, Engineering, Micromechanics +19

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

E. W. Becker, W. Ehrfeld, Patric Hagmann et al. · Microelectronic Engineering · 1986 · 957 citations

Materials Science, Engineering, Plastic Moulding +10

A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs

Md. Shafiqul Islam, P.J. McNally · Microelectronic Engineering · 1998 · 606 citations

Wide-bandgap Semiconductor, Electrical Engineering, Engineering +8

Polycrystalline Silicon Micromechanical Beams

Roger T. Howe, R.S. Muller · Journal of The Electrochemical Society · 1983 · 192 citations

Materials Science, Mechanical Beams, Engineering +13

Resist technology for deep‐etch synchrotron radiation lithography

J. Mohr, W. Ehrfeld, D. Münchmeyer et al. · Makromolekulare Chemie Macromolecular Symposia · 1989 · 27 citations

Engineering, Electron-beam Lithography, Solubility Parameters +16