Publication | Closed Access
Fabrication of capacitive acceleration sensors by the LIGA technique
81
Citations
6
References
1991
Year
EngineeringImplantable SensorSensorsMicrofabricationMechanical EngineeringSensor DesignInstrumentationSensor TechnologyLiga Technique
| Year | Citations | |
|---|---|---|
1982 | 2.9K | |
1986 | 957 | |
1998 | 606 | |
1983 | 192 | |
1989 | 27 | |
1988 | 19 |
Page 1
Page 1