Fabrication of capacitive acceleration sensors by the LIGA technique

Page 1

	Year	Citations
Silicon as a mechanical material K. Petersen Proceedings of the IEEE MiniaturizationEngineeringMicromechanicsSingle-crystal SiliconMechanical Engineering	1982	2.9K
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) E. W. Becker, W. Ehrfeld, Patric Hagmann, Microelectronic Engineering Materials ScienceEngineeringPlastic MouldingMicrofabricationDigital Fabrication	1986	957
A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAs Md. Shafiqul Islam, P.J. McNally Microelectronic Engineering Wide-bandgap SemiconductorElectrical EngineeringEngineeringPhysicsNanoelectronics	1998	606
Polycrystalline Silicon Micromechanical Beams Roger T. Howe, R.S. Muller Journal of The Electrochemical Society Materials ScienceMechanical BeamsEngineeringMicromachinesMicromechanics	1983	192
Resist technology for deep‐etch synchrotron radiation lithography J. Mohr, W. Ehrfeld, D. Münchmeyer, Makromolekulare Chemie Macromolecular Symposia EngineeringElectron-beam LithographySolubility ParametersChemistryStructural Materials	1989	27
Microfabrication of membranes with extreme porosity and uniform pore size W. Ehrfeld, R. Einhaus, D. Münchmeyer, Journal of Membrane Science Materials ScienceMembrane StructureExtreme PorosityMembrane FormationEngineering	1988	19

Page 1