Concepedia

Mems Capacitive Accelerometers

MEMS Capacitive Accelerometers is a microelectromechanical system-based inertial sensor that measures acceleration by detecting changes in capacitance resulting from the displacement of a proof mass within a variable-gap capacitor structure.

219

Publications

7.4K

Citations

678

Authors

211

Institutions

Publications per year

2017–2026

58

Variants

Mems Capacitive Accelerometer

Parents

Publications

219

Proceedings of IEEE/ASME International Conference on Advanced Intelligent Mechatronics

1997 · 281 citations

, , +14

WALNUT: Waging Doubt on the Integrity of MEMS Accelerometers with Acoustic Injection Attacks

Timothy Trippel, Ofir Weisse, Wenyuan Xu et al. · 2017 · 279 citations

, , +15

Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

Lars Zimmermann, J.Ph. Ebersohl, Fu-Lian Hung et al. · Sensors and Actuators A Physical · 1995 · 141 citations

, , +17

A Monolithic CMOS-MEMS 3-Axis Accelerometer With a Low-Noise, Low-Power Dual-Chopper Amplifier

Hongwei Qu, Deyou Fang, Huikai Xie · IEEE Sensors Journal · 2008 · 128 citations

, , +17

Capacitive detection scheme for space accelerometers applications

Vincent Josselin, Pierre Touboul, R. Kielbasa · Sensors and Actuators A Physical · 1999 · 115 citations

, , +11

1–5 of 219

Authors

678

  1. MK
    Michaël Kraft

    University of Southampton, United Kingdom

    9 publications · 270 citations

    9

    h-index

  2. MT
    Ming‐Han Tsai

    National Yang Ming Chiao Tung University, Taiwan

    8 publications · 304 citations

    8

    h-index

  3. KN
    K. Najafi

    University of Michigan, United States

    8 publications · 215 citations

    8

    h-index

  4. GK
    Gary K. Fedder

    Carnegie Mellon University, United States

    7 publications · 278 citations

    7

    h-index

  5. WF
    Weileun Fang

    National Tsing Hua University, Taiwan

    7 publications · 217 citations

    7

    h-index

1–5 of 678

Institutions

211

  1. National Tsing Hua University

    Hsinchu, Taiwan

    12 h-index

    54 publications

    2.1K citations

  2. China Academy of Engineering Physics

    Mianyang, China

    11 h-index

    32 publications

    1.1K citations

  3. Carnegie Mellon University

    Pittsburgh, United States

    9 h-index

    24 publications

    896 citations

  4. University of Michigan

    Ann Arbor, United States

    9 h-index

    30 publications

    1.7K citations

  5. Middle East Technical University

    Ankara, Türkiye

    7 h-index

    12 publications

    497 citations

  6. Shanghai Institute of Microsystem and Information Technology

    Shanghai, China

    6 h-index

    29 publications

    749 citations

  7. University of Southampton

    Southampton, United Kingdom

    6 h-index

    13 publications

    338 citations

  8. University of Electronic Science and Technology of China

    Chengdu, China

    6 h-index

    23 publications

    459 citations

1–8 of 211

Venues

  1. Sensors and Actuators A Physical

    24 publications · 1.3K citations

    18

    h-index

  2. IEEE Sensors Journal

    16 publications · 683 citations

    15

    h-index

  3. Microsystem Technologies

    15 publications · 422 citations

    12

    h-index

  4. Journal of Micromechanics and Microengineering

    JMM · 13 publications · 345 citations

    11

    h-index

  5. Journal of Microelectromechanical Systems

    9 publications · 400 citations

    9

    h-index

1–5