Concepedia

Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

Lars Zimmermann, J.Ph. Ebersohl, Fu-Lian Hung, Jessie Berry, F. Baillieu, P. Rey, B. Diem, S. Renard, P. Caillat

Sensors and Actuators A Physical · 1995 · 141 citations · 6 references

DOI

Concepts

References

6

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 506 citations

, , +17

Squeeze-film damping in solid-state accelerometers

J. B. Starr · 1990 · 277 citations

, , +18

Accelerometer systems with self-testable features

Henry V. Allen, S.C. Terry, Diederik W. de Bruin · Sensors and Actuators · 1989 · 122 citations

, , +7

Capacitive silicon accelerometer with highly symmetrical design

H. Seidel, Hermann Riedel, R. Kolbeck et al. · Sensors and Actuators A Physical · 1990 · 114 citations

, , +5

A micromechanical capacitive accelerometer with a two-point inertial-mass suspension

F. Rudolf · Sensors and Actuators · 1983 · 73 citations

, , +6