Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

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	Year	Citations
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Squeeze-film damping in solid-state accelerometers J. B. Starr EngineeringMechanical EngineeringSqueeze-film DampingMicro-electromechanical SystemVibrations	1990	277
Accelerometer systems with self-testable features Henry V. Allen, S.C. Terry, Diederik W. de Bruin Sensors and Actuators Sensor CalibrationAccelerometer SystemsEngineeringCalibrationAccelerometer	1989	122
Capacitive silicon accelerometer with highly symmetrical design H. Seidel, Hermann Riedel, R. Kolbeck, Sensors and Actuators A Physical Capacitive Silicon AccelerometerEngineeringAccelerometerWearable TechnologyInstrumentation	1990	114
A micromechanical capacitive accelerometer with a two-point inertial-mass suspension F. Rudolf Sensors and Actuators Micromechanical Capacitive AccelerometerEngineeringMechanical EngineeringAccelerometerMechanical Systems	1983	73
Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer R.P. van Kampen, Michael J. Vellekoop, P.M. Sarro, Sensors and Actuators A Physical Electrostatic FeedbackElectrical EngineeringEngineeringAccelerometerMechanical Systems	1994	66

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