A batch-fabricated silicon accelerometer

TLDR

The accelerometer is a 3‑mm long, 0.02‑g cantilevered beam with a mass, sealed in a silicon‑glass package, fabricated using standard silicon IC processes and modeled by a simple beam‑mass theory. Experimental tests show the device achieves 0.001–50 g sensitivity over a 100‑Hz bandwidth with linearity matching theory, and its compact size and tunable geometry make it suitable for a wide range of applications.

Abstract

An extremely small batch-fabricatable accelerometer has been developed using silicon IC technology. The device, 3 mm long and weighing 0.02 g, is a simple cantilevered beam and mass structure sealed into a silicon and glass package. The fabrication of the accelerometer is described, and the theory behind its operation developed. Experimental results on sensitivity, frequency response, and linearity are presented and found to agree with theory. The accelerometer is capable of measuring accelerations from 0.001 to 50 g over a 100-Hz bandwidth, while readily implemented geometry changes allow these performance characteristics to be varied over a wide range to meet the needs of differing applications.