B. Diem

Airbag application: a microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability

Lars Zimmermann, J.Ph. Ebersohl, Fu-Lian Hung et al. · Sensors and Actuators A Physical · 1995 · 141 citations

Biomedical Sensors, Engineering, Aerospace Engineering +5

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, Patrice Rey, S. Renard et al. · Sensors and Actuators A Physical · 1995 · 93 citations

Engineering, Soft Robotics, Sensors +11

‘SIMOX’ (Separation by Ion Implantation of Oxygen): a Technology for high-temperature silicon sensors

B. Diem, R. Truche, S. Viollet-Bosson et al. · Sensors and Actuators A Physical · 1990 · 23 citations

High-temperature Silicon Sensors, Chemical Engineering, Ion Implantation +9

Low voltage high isolation MEMS switches

Pierre Blondy, D. Cros, P. Guillon et al. · 2002 · 16 citations

Low-power Electronics, Electrical Engineering, Wafer Scale Processing +12

A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

Marion Dufour, M.T. Delaye, F. Michel et al. · Sensors and Actuators A Physical · 1992 · 14 citations

Engineering, Micromachines, Sensors +10