Publication | Closed Access
‘SIMOX’ (Separation by Ion Implantation of Oxygen): a Technology for high-temperature silicon sensors
23
Citations
4
References
1990
Year
High-temperature Silicon SensorsChemical EngineeringIon ImplantationEngineering‘ Simox ’BioelectronicsApplied PhysicsSemiconductor Device FabricationSensor DesignSilicon On InsulatorMicroelectronicsSensor Technology
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