A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Etched silicon vibrating sensor

J. C. Greenwood · Journal of Physics E Scientific Instruments · 1984 · 118 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Micromachining of quartz and its application to an acceleration sensor

J.S. Danel, F. Michel, G. Delapierre · Sensors and Actuators A Physical · 1990 · 60 citations

Engineering, Materials Engineering, Physics +12

A thermally-excited silicon accelerometer

D.W. Satchell, J. C. Greenwood · Sensors and Actuators · 1989 · 48 citations

Engineering, Mechanical Engineering, Physics +12

Resonant diaphragm pressure measurement system with ZnO on Si excitation

J.G. Smiths, H.A.C. Tilmans, Klaas Hoen et al. · Sensors and Actuators · 1983 · 41 citations · Full text

Engineering, Mechanical Engineering, Instrumentation +11