Concepedia

F. Michel

FM

5

Publications

189

Citations

5

H-Index

1990

Active since

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Direction de la Recherche Technologique

Laboratoire d'Électronique des Technologies de l'Information

F. Michel is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in engineering, instrumentation, and sensors.

Top concepts

EngineeringSensorsInstrumentationMicrofabricationSensor DesignSensor TechnologyMechanical EngineeringMicrofluidicsPhysicsEducation

Publications per year

1990–2004

5

Publications

5

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, Patrice Rey, S. Renard et al. · Sensors and Actuators A Physical · 1995 · 93 citations

Engineering, Soft Robotics, Sensors +11

Micromachining of quartz and its application to an acceleration sensor

J.S. Danel, F. Michel, G. Delapierre · Sensors and Actuators A Physical · 1990 · 60 citations

Engineering, Micromachines, Sensors +10

A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

Marion Dufour, M.T. Delaye, F. Michel et al. · Sensors and Actuators A Physical · 1992 · 14 citations

Engineering, Micromachines, Sensors +10

Application of quartz micromachining to the realization of a pressure sensor

J.S. Danel, Marion Dufour, F. Michel · 2002 · 12 citations

Engineering, Mechanical Engineering, Vibration Measurement +20

DESIGN OF THE LOW-BETA, QUARTER-WAVE RESONATOR AND ITS CRYOMODULE FOR THE SPIRAL 2 PROJECT

Pierre-Emmanuel Bernaudin, P. Bosland, S. Chel et al. · 2004 · 10 citations

Electrical Engineering, Engineering, Nuclear Physics +15

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