Application of quartz micromachining to the realization of a pressure sensor

Abstract

The possibility of using quartz for the realization of vibrating beams used as the basic part of a pressure sensor is examined. A comparison with silicon is made, as, from the point of view of their crystalline structure and their high modulus of elasticity, both materials are good candidates for such use. Quartz was preferred because of its simpler technology. A technology used for the micromachining of quartz and based on chemical etching is described. This knowledge was applied to the realization of a pressure sensor. The complete device, which consists of three sealed quartz wafers, is described. Original techniques for the realization of conductive tracks and for anodic bonding of quartz wafers are also described.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>