SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators - Concepedia

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SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

93

Citations

3

References

1995

Year

B. Diem, Patrice Rey, S. Renard, S. Viollet Bosson, H. Bono, F. Michel, M.T. Delaye, G. Delapierre

Sensors and Actuators A Physical

EngineeringSoft RoboticsSensorsMicrofabricationSoi 'SimoxMicromachinesNew AgeSilicon SensorsMicroactuatorMicroscale SystemTechnologyMicroelectronicsMicro-electromechanical SystemMicrofluidics

References

	Year	Citations

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