Concepedia

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, Patrice Rey, S. Renard, S. Viollet Bosson, H. Bono, F. Michel, M.T. Delaye, G. Delapierre

Sensors and Actuators A Physical · 1995 · 93 citations · 3 references

Concepts

EngineeringMaterials EngineeringMaterials ScienceMicrofabricationSemiconductor DevicesSensorsBulk MicromachiningMems ActuatorsMems DesignMicrofabrication ProcessesMicromachiningSurface MicromachiningBulk Micromachined ActuatorsMicroelectromechanical ActuatorsMicrofabricated SensorsMicromachined SensorsSiliconSilicon MicromachiningSurface Micromachined Actuators

References

3

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations

Natural Sciences, Materials Engineering, Materials Science +10

A theoretical study of transducer noise in piezoresistive and capacitive silicon pressure sensors

R.R. Spender, Bruce Fleischer, P.W. Barth et al. · IEEE Transactions on Electron Devices · 1988 · 47 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Monolithic silicon accelerometer

Burton Boxenhorn, Paul Greiff · Sensors and Actuators A Physical · 1990 · 28 citations