M.T. Delaye

Statistics

Publications

Citations

292

H-Index

Active since

1982

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

Laboratoire d'Électronique des Technologies de l'Information

CEA Grenoble

Direction de la Recherche Technologique

M.T. Delaye is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in materials science, materials engineering, and microfabrication.

Publications per year

1982–2007

Publications

Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

F. Filhol, Emmanuel Defaÿ, C. Divoux et al. · Sensors and Actuators A Physical · 2005 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +16

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, Patrice Rey, S. Renard et al. · Sensors and Actuators A Physical · 1995 · 93 citations

Engineering, Materials Engineering, Materials Science +16

A high density capacitive pressure sensor array for fingerprint sensor application

Patrice Rey, P.L. Charvet, M.T. Delaye et al. · 2002 · 32 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

A comparison between micromachined pressure sensors using quartz or silicon vibrating beams

Marion Dufour, M.T. Delaye, F. Michel et al. · Sensors and Actuators A Physical · 1992 · 14 citations

Engineering, Materials Engineering, Mechanical Engineering +12

Ion implantation profiles in bubble garnets

P. Gérard, M.T. Delaye, R. Danielou · Thin Solid Films · 1982 · 13 citations

Natural Sciences, Materials Science, Physics +4

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