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Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

Resonant Micro-mirrorPhotonicsOptical MaterialsEngineeringMicrofabricationOptical PropertiesMechanical EngineeringApplied PhysicsPiezoelectricityPiezoelectric MaterialOptical SystemsMicro-optical ComponentThin-film Piezoelectric ActuatorMicro-electromechanical SystemMicromachined Ultrasonic Transducer