Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

A Flat High-Frequency Scanning Micromirror

Robert A. Conant, Julia Nee, K.Y. Lau et al. · 2000 · 157 citations · Full text

Engineering, Mechanical Engineering, Actuators +15

A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges

Hiroshi Miyajima, N. Asaoka, M. Arima et al. · Journal of Microelectromechanical Systems · 2001 · 86 citations

Engineering, Electrical Engineering, Materials Science +12

A novel asymmetric silicon micro-mirror for optical beam scanning display

Kenneth M. Yamada, T. Kuriyama · 2002 · 57 citations

Engineering, Electrical Engineering, Microelectronics +12

Development and characterization of membranes actuated by a PZT thin film for MEMS applications

C. Zinck, David Pinceau, Emmanuel Defaÿ et al. · Sensors and Actuators A Physical · 2004 · 38 citations

Engineering, Materials Engineering, Materials Science +14

Fabrication, simulation and experiment of a rotating electrostatic silicon mirror with large angular deflection

Henri Camon, Franck Larnaudie · 2002 · 32 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17