Concepedia

Micro-scanning Mirrors

Micro-Scanning Mirrors is a micro-electromechanical optical device that enables precise, dynamic control of light beams through controllable angular deflection of a reflective microstructure integrated within an Optical MEMS system.

106

Publications

3.5K

Citations

364

Authors

98

Institutions

Publications per year

2017–2026

28

Parents

Publications

106

Large deflection micromechanical scanning mirrors for linear scans and pattern generation

Harald Schenk, Peter Dürr, Thomas Haase et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2000 · 176 citations

, , +15

Stroboscopic interferometer system for dynamic MEMS characterization

Matthew Hart, Robert A. Conant, Kam Y. Lau et al. · Journal of Microelectromechanical Systems · 2000 · 142 citations

, , +17

Resonant micro-mirror excited by a thin-film piezoelectric actuator for fast optical beam scanning

F. Filhol, Emmanuel Defaÿ, C. Divoux et al. · Sensors and Actuators A Physical · 2005 · 118 citations

, , +16

Two-axis MEMS Scanning Catheter for Ultrahigh Resolution Three-dimensional and En Face Imaging

Aaron D. Aguirre, Paul R. Hertz, Yu Chen et al. · Optics Express · 2007 · 117 citations · Full text

, , +15

Surface tension powered self-assembly of 3-D micro-optomechanical structures

R.R.A. Syms · Journal of Microelectromechanical Systems · 1999 · 111 citations

, , +15

1–5 of 106

Authors

364

  1. HS
    Harald Schenk

    Fraunhofer Institute for Photonic Microsystems, Germany

    22 publications · 713 citations

    15

    h-index

  2. HX
    Huikai Xie

    University of Florida, United States

    11 publications · 350 citations

    11

    h-index

  3. HL
    Hubert Lakner

    Fraunhofer Institute for Photonic Microsystems, Germany

    12 publications · 531 citations

    11

    h-index

  4. TS
    Thilo Sandner

    Fraunhofer Institute for Photonic Microsystems, Germany

    10 publications · 179 citations

    10

    h-index

  5. AW
    Alexander Wolter

    Fraunhofer Institute for Photonic Microsystems, Germany

    5 publications · 157 citations

    5

    h-index

1–5 of 364

Institutions

98

  1. Fraunhofer Institute for Photonic Microsystems

    Dresden, Germany

    12 h-index

    81 publications

    1.7K citations

  2. University of Florida

    Gainesville, United States

    9 h-index

    22 publications

    809 citations

  3. Fraunhofer Institute for Microelectronic Circuits and Systems

    Duisburg, Germany

    6 h-index

    26 publications

    1.8K citations

  4. Chinese Academy of Sciences

    Beijing, China

    5 h-index

    15 publications

    442 citations

  5. Fraunhofer-Gesellschaft

    Munich, Germany

    5 h-index

    16 publications

    360 citations

  6. University of California, Berkeley

    Berkeley, United States

    5 h-index

    19 publications

    1.7K citations

  7. Ewha Womans University

    Seoul, South Korea

    4 h-index

    8 publications

    177 citations

  8. University of Stuttgart

    Stuttgart, Germany

    4 h-index

    4 publications

    334 citations

1–8 of 98

Venues

  1. Sensors and Actuators A Physical

    17 publications · 730 citations

    14

    h-index

  2. 14

    h-index

  3. Micromachines

    7 publications · 249 citations

    7

    h-index

  4. Journal of Microelectromechanical Systems

    5 publications · 347 citations

    5

    h-index

  5. Journal of Micromechanics and Microengineering

    JMM · 5 publications · 126 citations

    5

    h-index

1–5