Harald Schenk

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Publications

Citations

1.8K

H-Index

Active since

1999

Affiliations

Fraunhofer Institute for Photonic Microsystems(Current)

Carinthian Tech Research

Fraunhofer Institute for Microelectronic Circuits and Systems

Fraunhofer-Gesellschaft

Brandenburg University of Technology Cottbus-Senftenberg

Harald Schenk is an author at Fraunhofer Institute for Photonic Microsystems specializing in microelectromechanical systems, engineering, and mems mirrors.

Publications per year

1999–2022

Publications

Large deflection micromechanical scanning mirrors for linear scans and pattern generation

Harald Schenk, Peter Dürr, Thomas Haase et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2000 · 176 citations

Engineering, Electrical Engineering, Mechanical Engineering +15

A small-gap electrostatic micro-actuator for large deflections

Holger Conrad, Harald Schenk, Bert Kaiser et al. · Nature Communications · 2015 · 113 citations · Full text

Engineering, Electrical Engineering, Mechanical Engineering +16

A resonantly excited 2D-micro-scanning-mirror with large deflection

Harald Schenk, Peter Dürr, Detlef Kunze et al. · Sensors and Actuators A Physical · 2001 · 108 citations

Engineering, Mechanical Engineering, Physics +8

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

Bert Kaiser, S. Langa, Lutz Ehrig et al. · Microsystems & Nanoengineering · 2019 · 74 citations · Full text

Engineering, Biomedical Engineering, Electrical Engineering +17

Applications and requirements for MEMS scanner mirrors

Alexander Wolter, Shu-Ting Hsu, Harald Schenk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 62 citations

Engineering, Manufacturing Engineering, Microelectromechanical Systems +16

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