Concepedia

Holger Conrad

HC

13

Publications

371

Citations

11

H-Index

2007

Active since

Affiliations

Fraunhofer Institute for Photonic Microsystems(Current)

Brandenburg University of Technology Cottbus-Senftenberg

Technische Universität Dresden

Arioso Systems (Germany)

Holger Conrad is an author at Fraunhofer Institute for Photonic Microsystems specializing in engineering, electrical engineering, and instrumentation.

ORCID

Top concepts

Publications per year

2007–2022

13

Publications

13

A small-gap electrostatic micro-actuator for large deflections

Holger Conrad, Harald Schenk, Bert Kaiser et al. · Nature Communications · 2015 · 111 citations · Full text

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

Bert Kaiser, S. Langa, Lutz Ehrig et al. · Microsystems & Nanoengineering · 2019 · 72 citations · Full text

Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration

Sebastian Uhlig, Matthieu Gaudet, S. Langa et al. · Micromachines · 2018 · 41 citations · Full text

, , +18

Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer

Jan Grahmann, Holger Conrad, Thilo Sandner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 19 citations

Single crystal silicon micro mirrors

Harald Schenk, Thilo Sandner, Christian Drabe et al. · Physica status solidi. C, Conferences and critical reviews/Physica status solidi. C, Current topics in solid state physics · 2009 · 19 citations

, , +14

Rows per page

1–5 of 13