Concepedia

Publication | Open Access

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers

DOIFull Paper Access

72

Citations

11

References

2019

Year

Bert Kaiser, S. Langa, Lutz Ehrig, Michael Stolz, Hermann A. G. Schenk, Holger Conrad, Harald Schenk, Klaus Schimmanz, David Schuffenhauer
Microsystems & Nanoengineering

References

YearCitations

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