Concepedia

Mems Simulation

MEMS Simulation is a computational modeling discipline within microelectromechanical systems engineering that enables the prediction of multidomain physical behaviors of microscopic mechanical and electro-mechanical components through numerical analysis and simulation techniques specific to their fabrication processes, material properties, and operational environments.

2.5K

Publications

83.7K

Citations

6.3K

Authors

1.4K

Institutions

Publications per year

2017–2026

620

Parents

Children

Publications

2.5K

Squeeze film air damping in MEMS

Minhang Bao, Heng Yang · Sensors and Actuators A Physical · 2007 · 693 citations

, , +10

A critical evaluation for a class of micro-mechanics models

Richard M. Christensen · Journal of the Mechanics and Physics of Solids · 1990 · 667 citations

, , +12

A reduced-order model for electrically actuated microbeam-based MEMS

Mohammad I. Younis, Eihab Abdel‐Rahman, Ali H. Nayfeh · Journal of Microelectromechanical Systems · 2003 · 584 citations

, , +16

Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications

Fei Lu, H P Lee, S.P. Lim · Smart Materials and Structures · 2003 · 467 citations · Full text

, , +17

Rarefaction and Compressibility Effects in Gas Microflows

Ali Beşkök, George Em Karniadakis, William S. Trimmer · Journal of Fluids Engineering · 1996 · 371 citations

, , +17

1–5 of 2.5K

Authors

6.3K

  1. MI
    Mohammad I. Younis

    King Abdullah University of Science and Technology, Saudi Arabia

    33 publications · 2.4K citations

    22

    h-index

  2. GK
    Gary K. Fedder

    Carnegie Mellon University, United States

    21 publications · 716 citations

    17

    h-index

  3. SS
    S.D. Senturia

    Massachusetts Institute of Technology, United States

    19 publications · 1.6K citations

    17

    h-index

  4. AF
    Attilio Frangi

    Politecnico di Milano, Italy

    22 publications · 716 citations

    17

    h-index

  5. GD
    Guifu Ding

    Shanghai Jiao Tong University, China

    18 publications · 462 citations

    16

    h-index

1–5 of 6.3K

Institutions

1.4K

  1. Politecnico di Milano

    Milan, Italy

    27 h-index

    130 publications

    4K citations

  2. Massachusetts Institute of Technology

    Cambridge, United States

    27 h-index

    106 publications

    5.7K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    26 h-index

    216 publications

    6.2K citations

  4. Carnegie Mellon University

    Pittsburgh, United States

    24 h-index

    110 publications

    4.1K citations

  5. University of Michigan

    Ann Arbor, United States

    23 h-index

    101 publications

    3.8K citations

  6. Chinese Academy of Sciences

    Beijing, China

    22 h-index

    153 publications

    4.8K citations

  7. University of California, Berkeley

    Berkeley, United States

    22 h-index

    125 publications

    5K citations

  8. Shanghai Jiao Tong University

    Shanghai, China

    21 h-index

    163 publications

    4.8K citations

1–8 of 1.4K

Venues

  1. Journal of Microelectromechanical Systems

    152 publications · 8.2K citations

    48

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 169 publications · 7.9K citations

    47

    h-index

  3. Sensors and Actuators A Physical

    118 publications · 5.3K citations

    42

    h-index

  4. Microsystem Technologies

    102 publications · 2.8K citations

    30

    h-index

  5. Sensors

    60 publications · 1.7K citations

    23

    h-index

1–5