Squeeze film air damping in MEMS

Scientific foundations of vacuum technique

Vacuum · 1962 · 1.6K citations

Natural Sciences, Physics, Plasma Physics +7

Mechanical-thermal noise in micromachined acoustic and vibration sensors

T. B. Gabrielson · IEEE Transactions on Electron Devices · 1993 · 737 citations · Full text

Engineering, Mechanical Engineering, Physics +17

Data on Internal Rarefied Gas Flows

Felix Sharipov, V. A. Seleznev · Journal of Physical and Chemical Reference Data · 1998 · 724 citations

Engineering, Mechanical Engineering, Physics +12

Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report—Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow

Shigehisa Fukui, R. Kaneko · Journal of Tribology · 1988 · 506 citations

Natural Sciences, Mechanical Engineering, Physics +15

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 463 citations

Engineering, Electrical Engineering, Physics +16